Vacuum Simulation
Start Simulation
3D Mode
- Click the check Complete button to complete the system
- Click the play_arrow Run Sim button to activate simulation
- Simulation charts appear on the right side of the screen
- Click the charts to display the simulation chart in a new window
Quick Mode
- Click the play_arrow Run Sim button to activate project menu, after input the system conditions
- Available project menu activated depending on input conditions
- Click each menu to display the simulation graph in a new window
Vacuum Simulation Charts
- Pump Down Time, Throughput, Conductance, and Effective Pumping Speed, 4 simulation charts
- Pump Down Time (PDT): Chamber pressure simulation over time
- Throughput (F/P): Gas throughput simulation of system
- Conductance (C): Conductance simulation in pipes
- Effective Pumping Speed (Seff): Effective pumping speed simulation
- Click each chart in 3D Mode to open the simulation chart in a new window
Pump Down Time (PDT)
- Mouse over the chart to see detailed data values at a particular point
- Select the systems want to display for comparison
- Check or uncheck the Switch Axis to check data by pressure or by time
- Switch Axis on: Pressure data of systems by time
- Switch Axis off: Time data of systems by pressure
- You can also Switch Axis by clicking on the chart
- Save data as an image or CSV file
Throughput (F/P)
- Mouse over the chart to see detailed data values at a particular point
- Select the systems want to display for comparison
- Check or uncheck the Switch Axis to check data by pressure or by throughput
- Switch Axis on: Pressure data of systems by throughput
- Switch Axis off: Throughput data of systems by pressure
- You can also Switch Axis by clicking on the chart
- Save data as an image or CSV file
Conductance (C)
- Mouse over the chart to see detailed data values at a particular point
- Select the systems want to display for comparison
- Check or uncheck the Switch Axis to check data by pressure or by conductance
- Switch Axis on: Conductance for each system by chamber pressure
- Switch Axis off: Chamber pressure for each system by conductance
- You can also Switch Axis by clicking on the chart
- Save data as an image or CSV file
Effective Pumping Speed (Seff)
- Mouse over the chart to see detailed data values at a particular point
- Effective pumping speed only shows simulated values for one system
- Select the systems want to display for comparison
- Save data as an image or CSV file
Pipe Conductance Evaluation (Pipe Eval)
- Pipe Eval is only available on 3D mode, Plus or Optimum plan
- Click the
Pipe Eval button on the project menu to activate pipe conductance (Orange: active, Blue: inactive)
- Click the
- Pipe information
- C Total: Total pipe conductance of the system under process pressure
- Length: Total pipe length of the system
- Elements: The number of pipe elements of the system
- Minimum and maximum pipe conductance values are displayed for each system at the process pressure, and display of color temperature index through a relative comparison of pipe conductance in system(s) at the process pressure
- Red: Minimum conductance
- Blue: Maximum conductance
- Default: Process pressure and unit set in the vacuum requirement throughput (Process pressure and unit can be changed)
- Input the process pressure or drag control bar to change pressure
- In split screen, changings of process pressure are applied to both systems simultaneously
Conductance Evaluation & Improvement
- Improvements functions are only available on a split screen
- Mouse over low conductance pipe elements (red) on existing system to see the tips for improvement
- Improve pipe conductance on new system with tips for improvement
- CT: Pipe conductance of element at process pressure
- Example: Through changing bend's angle from 90° to 45°, conductance has been increased
- Compare conductance before and after with changes in pipe color temperature and conductance values
Pump Capacity Evaluation (Pump Eval)
- Click the close_fullscreen Pump Eval button to evaluate capacity of pump used in each system
- Simulation chart by increasing and decreasing pump speed depends on pump type
- Primary: Pumping speed increase and decrease in all pressure range
- Primary+Roots: Pumping speed increase and decrease from the operation pressure range of roots pump
- Check the pumping speed, pump down time, and throughput simulation charts with requirement when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
- Through the pump capacity evaluation, it is possible to prevent the use of pumps that do not meet the process conditions or have unnecessarily exceeded capacity
- In this case, chamber and piping are under the same conditions
- Pump Eval is only available on Plus or Optimum plans
Pumping Speed
- Pumping speed when it is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
- Mouse over the chart to see detailed data values at a particular point
- Vertical guideline: Pumping speed at that pressure
- Horizontal guideline: Pressure corresponding to that pumping speed
- Mouse click to change vertical/horizontal guideline direction
Evaluating Pump Capacity through Pump Down Time (PDT) Simulation Charts
- Check the pump down time simulation chart when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
- Mouse over the chart to see detailed data values at a particular point
- Vertical guideline: Chamber pressure value at that time
- Horizontal guideline: The time it takes to reach that pressure
- Click the chart to change vertical/horizontal guideline direction
- Blue dot is process condition(Target pressure and Takt time) set in vacuum requirement → See Requirement Setting
- In this case, chamber and piping are under the same conditions
Evaluating Pump Capacity through Throughput (F/P) Simulation Charts
- Check the throughput simulation chart when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
- Vertical guideline: Throughput at that pressure
- Horizontal guideline: Process pressure at that throughput
- Click the chart to change vertical/horizontal guideline direction
- Blue dot is process condition (gas flow and process pressure) set in vacuum requirement → See Requirement Setting
- In this case, chamber and piping are under the same conditions
Chart Setting
- Click the settings Chart Settings button to adjust chart setting
- Chart setting
- Font Size: Set the font size (default: Small)
- Subtitle: Input the subtitle (default: Project name)
- X Unit: Change x-axis unit
- Y Unit: Change y-axis unit
- Save data as an image or CSV file