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Vacuum Simulation

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3D Mode

  • Click the check Complete button to complete the system
  • Click the play_arrow Run Sim button to activate simulation
  • Simulation charts appear on the right side of the screen
  • Click the charts to display the simulation chart in a new window

Quick Mode

  • Click the play_arrow Run Sim button to activate project menu, after input the system conditions
  • Available project menu activated depending on input conditions
  • Click each menu to display the simulation graph in a new window

Vacuum Simulation Charts

  • Pump Down Time, Throughput, Conductance, and Effective Pumping Speed, 4 simulation charts
    • Pump Down Time (PDT): Chamber pressure simulation over time
    • Throughput (F/P): Gas throughput simulation of system
    • Conductance (C): Pipe conductance simulation
    • Effective Pumping Speed (Seff): Effective pumping speed simulation
  • Click each chart in 3D Mode to open the simulation chart in a new window

Pump Down Time (PDT)

  1. Mouse over the chart to see detailed data values at a particular point
  2. Select the systems want to display for comparison
  3. Check or uncheck the Switch Axis to check data by pressure or by time
    • Switch Axis on: Pressure data of systems by time
    • Switch Axis off: Time data of systems by pressure
    • You can also Switch Axis by clicking on the chart
  4. Save data as an image or CSV file

Throughput (F/P)

  1. Mouse over the chart to see detailed data values at a particular point
  2. Select the systems want to display for comparison
  3. Check or uncheck the Switch Axis to check data by pressure or by throughput
    • Switch Axis on: Pressure data of systems by throughput
    • Switch Axis off: Throughput data of systems by pressure
    • You can also Switch Axis by clicking on the chart
  4. Save data as an image or CSV file

Conductance (C)

  1. Mouse over the chart to see detailed data values at a particular point
  2. Select the systems want to display for comparison
  3. Check or uncheck the Switch Axis to check data by pressure or by conductance
    • Switch Axis on: Conductance for each system by chamber pressure
    • Switch Axis off: Chamber pressure for each system by conductance
    • You can also Switch Axis by clicking on the chart
  4. Save data as an image or CSV file

Effective Pumping Speed (Seff)

  1. Mouse over the chart to see detailed data values at a particular point
    • Effective pumping speed only shows simulated values for one system
  2. Select the systems want to display for comparison
  3. Save data as an image or CSV file

Pipe Evaluation

  1. Piping Evaluation is available only in the Plus plan and above
    • Evaluate the piping's conductance by clicking Pipe Eval in the Project menu
  2. Enter the Pressure, Lower Conductance Limit, and Upper Conductance Limit
  3. Based on the pressure, the C Total for each system is compared with the Lower and Upper Conductance Limits of the vacuum requirement, and the result is displayed as PASS/FAIL
    • PASS check_circle: C Total is within the range
    • FAIL arrow_circle_down: C Total is lower than the Lower Conductance Limit
    • FAIL arrow_circle_up: C Total is higher than the Upper Conductance Limit

HiPath™

  1. HiPath™ is only available on 3D mode, Plus plan and above
    • Click the HiPath™ button on the project menu to activate pipe conductance
  2. Pipe information
    • C Total: Total pipe conductance of the system under process pressure
    • Length: Total pipe length of the system
    • Elements: The number of pipe elements of the system
  3. Minimum and maximum pipe conductance values are displayed for each system at the process pressure, and display of color temperature index through a relative comparison of pipe conductance in system(s) at the process pressure
    • Red: Minimum conductance
    • Blue: Maximum conductance
  4. Default: Process pressure and unit set in the vacuum requirement throughput (Process pressure and unit can be changed)
    • Input the process pressure or drag control bar to change pressure
    • In split screen, changings of process pressure are applied to both systems simultaneously

Conductance Evaluation & Improvement

  1. Improvements functions are only available on a split screen
  2. Mouse over low conductance pipe elements (red) on existing system to see the tips for improvement
    • Improve pipe conductance on new system with tips for improvement
    • CT: Pipe conductance of element at process pressure
  3. Example: Through changing bend's angle from 90° to 45°, conductance has been increased
    • Compare conductance before and after with changes in pipe color temperature and conductance values

CapaScan™ & Pump Capacity Evaluation

  • Click the close_fullscreen CapaScan™ or close_fullscreen Pump Eval button to evaluate capacity of pump used in each system
  • Simulation chart by increasing and decreasing pump speed depends on pump type
    • Primary: Pumping speed increase and decrease in all pressure range
    • Primary+Roots: Pumping speed increase and decrease from the operation pressure range of roots pump
  • Check the pumping speed, pump down time, and throughput simulation charts with requirement when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
  • Through the pump capacity evaluation, it is possible to prevent the use of pumps that do not meet the process conditions or have unnecessarily exceeded capacity
  • In this case, chamber and piping are under the same conditions
  • Pump Eval is available on the Plus plan and above, while CapaScan™ is available on the Optimum plan and above

Pumping Speed

  • Pumping speed when it is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
  • Mouse over the chart to see detailed data values at a particular point
    • Vertical guideline: Pumping speed at that pressure
    • Horizontal guideline: Pressure corresponding to that pumping speed
  • Mouse click to change vertical/horizontal guideline direction

Evaluating Pump Capacity through Pump Down Time (PDT) Simulation Charts

  • Check the pump down time simulation chart when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
  • Mouse over the chart to see detailed data values at a particular point
    • Vertical guideline: Chamber pressure value at that time
    • Horizontal guideline: The time it takes to reach that pressure
  • Click the chart to change vertical/horizontal guideline direction
  • Blue dot is process condition (Target pressure and Takt time) set in vacuum requirement → See Project Creation & Set the Requirements
    • If you're using CapaScan™, the pumping speed chart that corresponds to that condition is displayed with a blue line
  • In this case, chamber and piping are under the same conditions

Evaluating Pump Capacity through Throughput (F/P) Simulation Charts

  • Check the throughput simulation chart when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
    • Vertical guideline: Throughput at that pressure
    • Horizontal guideline: Process pressure at that throughput
  • Click the chart to change vertical/horizontal guideline direction
  • Blue dot and red dot are process conditions (Gas flow and Process pressure) set in vacuum requirements → See Project Creation & Set the Requirements
    • If you're using CapaScan™, the pumping speed chart that corresponds to that condition is displayed with blue line and red line
  • In this case, chamber and piping are under the same conditions

Chart Setting

  1. Click the settings Chart Settings button to adjust chart setting
  2. Chart setting
    • Font Size: Set the font size (default: Small)
    • Line Width: Set the line width of chart (default: Thin)
    • Subtitle: Input the subtitle (default: Project name)
    • X Unit: Change x-axis unit
    • Y Unit: Change y-axis unit
  3. Save data as an image or CSV file

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