Vacuum Simulation

Click the play_arrow Run Sim button to activate project menu, after input the system conditions
Available project menu activated depending on input conditions
Click each menu to display the simulation graph in a new window

Pump Down Time, Throughput, Conductance, and Effective Pumping Speed, 4 simulation charts
- Pump Down Time (PDT): Chamber pressure simulation over time
- Throughput (F/P): Gas throughput simulation of system
- Conductance (C): Pipe conductance simulation
- Effective Pumping Speed (Seff): Effective pumping speed simulation
Click each chart in 3D Mode to open the simulation chart in a new window

Mouse over the chart to see detailed data values at a particular point
Select the systems want to display for comparison
Check or uncheck the Switch Axis to check data by pressure or by time
- Switch Axis on: Pressure data of systems by time
- Switch Axis off: Time data of systems by pressure
- You can also Switch Axis by clicking on the chart
Save data as an image or CSV file

Mouse over the chart to see detailed data values at a particular point
Select the systems want to display for comparison
Check or uncheck the Switch Axis to check data by pressure or by throughput
- Switch Axis on: Pressure data of systems by throughput
- Switch Axis off: Throughput data of systems by pressure
- You can also Switch Axis by clicking on the chart
Save data as an image or CSV file

Mouse over the chart to see detailed data values at a particular point
Select the systems want to display for comparison
Check or uncheck the Switch Axis to check data by pressure or by conductance
- Switch Axis on: Conductance for each system by chamber pressure
- Switch Axis off: Chamber pressure for each system by conductance
- You can also Switch Axis by clicking on the chart
Save data as an image or CSV file

Mouse over the chart to see detailed data values at a particular point
- Effective pumping speed only shows simulated values for one system
Select the systems want to display for comparison
Save data as an image or CSV file

Pipe Eval is only available on 3D mode, Plus or Optimum plan
- Click the Pipe Eval button on the project menu to activate pipe conductance
Pipe information
- C Total: Total pipe conductance of the system under process pressure
- Length: Total pipe length of the system
- Elements: The number of pipe elements of the system
Minimum and maximum pipe conductance values are displayed for each system at the process pressure, and display of color temperature index through a relative comparison of pipe conductance in system(s) at the process pressure
- Red: Minimum conductance
- Blue: Maximum conductance
Default: Process pressure and unit set in the vacuum requirement throughput (Process pressure and unit can be changed)
- Input the process pressure or drag control bar to change pressure
- In split screen, changings of process pressure are applied to both systems simultaneously

Improvements functions are only available on a split screen
Mouse over low conductance pipe elements (red) on existing system to see the tips for improvement
- Improve pipe conductance on new system with tips for improvement
- CT: Pipe conductance of element at process pressure
Example: Through changing bend's angle from 90° to 45°, conductance has been increased
- Compare conductance before and after with changes in pipe color temperature and conductance values

Click the close_fullscreen Pump Eval button to evaluate capacity of pump used in each system
Simulation chart by increasing and decreasing pump speed depends on pump type
- Primary: Pumping speed increase and decrease in all pressure range
- Primary+Roots: Pumping speed increase and decrease from the operation pressure range of roots pump
Check the pumping speed, pump down time, and throughput simulation charts with requirement when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
Through the pump capacity evaluation, it is possible to prevent the use of pumps that do not meet the process conditions or have unnecessarily exceeded capacity
In this case, chamber and piping are under the same conditions
Pump Eval is only available on Plus or Optimum plans

Pumping speed when it is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
Mouse over the chart to see detailed data values at a particular point
- Vertical guideline: Pumping speed at that pressure
- Horizontal guideline: Pressure corresponding to that pumping speed
Mouse click to change vertical/horizontal guideline direction

Check the pump down time simulation chart when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
Mouse over the chart to see detailed data values at a particular point
- Vertical guideline: Chamber pressure value at that time
- Horizontal guideline: The time it takes to reach that pressure
Click the chart to change vertical/horizontal guideline direction
Blue dot is process condition (Target pressure and Takt time) set in vacuum requirement → See Project Creation & Set the Requirements
- The Pumping speed chart that corresponds to that condition is displayed with a blue line
In this case, chamber and piping are under the same conditions

Check the throughput simulation chart when the pumping speed of pump (100%) in the system is increased and decreased to 30%, 50%, 70%, 150%, 200%, 300%
- Vertical guideline: Throughput at that pressure
- Horizontal guideline: Process pressure at that throughput
Click the chart to change vertical/horizontal guideline direction
Blue dot and red dot are process conditions (Gas flow and Process pressure) set in vacuum requirements → See Project Creation & Set the Requirements
- The Pumping speed chart that corresponds to that condition is displayed with blue line and red line
In this case, chamber and piping are under the same conditions