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FitVac™

SaaS-Based Vacuum System Optimization SolutionFitVac™

Vacuum piping and pumps are configured and combined in a wide variety of ways depending on external installation conditions, such as fab height, columns, foundation piping & equipment as well as internal conditions, including the chamber & processes.

Depending on how they are configured and combined, the overall system efficiency, capital costs, and power consumption can vary significantly.

During the design phase of a fab, plant, or system, by utilizing the intuitive FitVac™, you can optimize the system by configuring piping with high conductance and selecting pumps with optimal capacity to meet chamber & process conditions.

You can configure up to 12 different systems and compare and analyze their performance all at once, ranging from atmospheric pressure to high vacuum.

Upon request, we can provide customized solutions either as Private SaaS or On-Premise tailored to your pre- and post-workflows.

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Vacuum Requirement Input play_arrow

Vacuum Requirement Input

These are the main requirements to consider when designing a vacuum system and you should input the most challenging conditions among the vacuum requirements or process recipes.

Pump Down Time Requirement

Input the starting pressure, target pressure, and the time required to reach the target pressure from the starting pressure, when pumping the chamber.

Throughput (Flow/Pressure) Requirement

Input the required chamber pressure and the gas flow rate, when injecting gas into the chamber.

3D Modeling play_arrow

3D Modeling

FitVac™ provides 3D modeling tools and symbolic icons for vacuum components. Users can pre-configure the system to be installed in 3D on the web and intuitively understand the system structure. This enables seamless communication with customers, across departments, and between team members.

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Vacuum Performance Simulation play_arrow

Vacuum Performance Simulation

Simulation results of pump down time, throughput can be seen. The vacuum requirements are also displayed on the same graph. This allows users to easily check if the system they are designing meets their vacuum requirements.

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Pipe Conductance play_arrow

Pipe Conductance

User can compare the conductance of the entire pipe by connection scenario throughout the pressure range. The conductance of each pipe element is displayed as a color temperature, allowing user to easily identify inefficient pipes and improve them with guided tips.

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Pump Capacity play_arrow

Pump Capacity

Shows multiple simulation results with increasing and decreasing pump speed of the applied pump, along with vacuum requirements. This prevents users from selecting a pump that does not meet the requirements or has excessive capacity.

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System Improvement & Optimization

System Improvement & Optimization

Users can replace low-efficiency piping sections and apply the right capacity pump. New systems can be configured as needed to further optimize the vacuum system.

System Comparison Before & After play_arrow

System Comparison Before & After

You can add up to 12 systems in one project and all systems can be compared in one graph! The result graphs of pump down time and throughput guide you to which system is more fit for your process. With intuitive and detailed graphs, You can decide to choose the most suitable vacuum system among them for your application.