3D Mode Project
Project Management
- Select the "Open…" in "Project" menu
- Rename, duplicate, delete the project
- Create a new project
Project Creation & Set the Requirements
- Input the project name
- Only Latin, numeric, and special characters can be entered
- Enter up to 50 characters
- Project name cannot be duplicated
- 3D mode project not compatible with Quick mode
- Settings for the Gas, Pipe Standard, and No. of Simulation Data
- Gas: N2 (Nitrogen), Air
- Pipe Standard: ASME, ISO/EN, KS/JIS
- No. of Simulation Data: Set the number of data appeared during the simulation (default: 1000, min.: 600, max.: 5000)
- Unit
- Conductance: Set the units applied when simulating conductance
- Pumping Speed: Set the units applied when simulating effective pumping speed (Seff)
- Pipe Length: Set the unit applied when evaluating pipe conductance
- Pump down time requirement
- Uncheck the Pump Down Time checkbox if not required
- Start Pressure: Chamber start pressure at (default: ATM)
- Target Pressure: Chamber target pressure want to reach
- Takt Time: Requested time from start pressure to target pressure
- Throughput requirement
- Uncheck the Throughput (Flow/Pressure) checkbox if not required
- Gas Flow: Gas flow injected to the chamber
- Process Pressure: Requested chamber pressure under gas flow
- Throughput (Flow/Pressure) 2: Additional requirement of throughput