Terminologies & References
Abbreviations
| Abbreviation | Original word | Description |
|---|---|---|
| Act. Vol. | Actual Volume | Real Volume |
| C | Conductance | Pipe conductance |
| Calc Vol. | Calculated Volume | Automatically calculated volume |
| Ch | Chamber Condition Input | Chamber condition input |
| Comp | System Completion | Completion of system |
| C-Eval | Pipe Conductance Evaluation | Evaluation of pipe conductance |
| DN | Nominal Diameter | Standard diameter size of pipe |
| Edge R. | Edge Radius | Radius of round edge |
| F/P | Throughput (Flow/Pressure) | Gas throughput of the pump by pressure |
| ID | Pipe Inside Diameter | Pipe inner diameter |
| PDT | Pump Down Time | Time to reach the target pressure from the starting pressure at chamber |
| Per. | Percentage | Percentage (%) |
| P-Eval | Pump Capacity Evaluation | Evaluation of pump capacity |
| Req | Requirement | Vacuum requirement |
| R/D (r/D) | Bend Radius / Inside Diameter | Bend radius/inner diameter ratio |
| Seff | Effective Pumping Speed | Actual exhaust velocity acting on the chamber |
| Sim | Vacuum Performance Simulation | Performance simulation of vacuum system |
| Wall Th. | Chamber Wall Thickness | Thickness of chamber wall |
Terminologies
| Terminology | Description |
|---|---|
| Angle valve | 90° Angle Valve |
| ASME | Industrial standards and standards development agencies in the United States |
| Bend | Round curved tube with R/D ratio |
| Capacity | Pumping capacity of pump (Normally peak pumping speed of pump) |
| Conductance | Opposition to the resistance of gas flow in pipes. Smoothness of gas flow in pipes |
| Cross section area | Cross section area of pipe |
| DN | Industrial standard for vacuum pipe |
| Elbow | Round curved tube |
| Flexible | A corrugated pipe used where vibration or play at a junction may occur |
| Gas flow | Amount of gas injected into the chamber continuously |
| Hole type | Type of connection between chamber and pipe |
| ISO/EN | European Industrial Standards and Standards Development Organization |
| KS | Korean Industrial Standards and standards development agency |
| Miter | Jointed or welded tube consisting of two parts with angle |
| Primary pump | Pump that operates from atmospheric pressure and consists of one pumping block (w/o Roots blower) |
| Primary + Roots pump | Pump that operates from atmospheric pressure and combined with 1 or 2 root blowers on the primary pump |
| Process pressure | Chamber pressure under a certain amount of gas flow |
| Pump down time | Time to reach the target pressure from the starting pressure at chamber |
| Pumping speed | Pumping capacity per pressure. Volume of gas passing through the cross section per unit time |
| Start pressure | The starting pressure at chamber during pumping down |
| Takt time | The desired time to reach the target pressure from the start pressure at chamber |
| Target pressure | Target pressure of chamber pressure to reach during pumping down |
| Throughput | Gas throughput of the pump. Amount of gas passing through a cross section per unit time |
| Effective pumping speed | Actual pumping speed working at the chamber |
References
| Title | Publisher | Author | Published Date |
|---|---|---|---|
| 진공 기술 해석 | 씨아이알 | 이제형 | Aug. 2021 |
| 진공 및 공정기술 | 내하출판사 | 김현후 외 | Feb. 2015 |
| 진공 공학 | 한국경제신문사 | 배석희 외 | Dec. 2007 |
| 기초 진공 공학 | 내하출판사 | 김현후 외 | Aug. 2007 |
| 진공 기술 실무 | 도서출판 홍릉 | 주장헌 | Apr. 2004 |
| 진공 과학 입문 | 교문사 (청문각) | 정석민 외 | Apr. 2001 |
| High Vacuum Technique; Theory, Practice, Industrial Applications, and Properties of Materials | Hassell Street Press | John Yarwood | 1995 |
| Vacuum Technology: Practice for Scientific Instruments | Springer | Nagamitsu Yoshimura | Sep. 2007 |
| The Foundations of Vacuum Coating Technology | Elsevier | Donald M. Mattox | Aug. 2008 |
| Foundations of Vacuum Science and Technology | William Andrew | James M. Lafferty | 1998 |
| Vacuum: Science, Technology and Applications | CRC Press | Pramod K. Naik | Jan. 2018 |
| Flow of Fluids Crane Technical Paper No. 410 Flow of Fluids Through Valves, Fittings, and Pipe U.S. Version 2018 | Crane Co. | Crane Co. | Jan. 2018 |
| Handbook of Vacuum Technology | Wiley-VCH | Karl Jousten; Wiley-VCH | Jun. 2015 |
| Vacuum Technology in the Chemical Industry | Wiley-VCH | Wolfgang Jorisch | Mar. 2015 |
| Total Pressure Measurements in Vacuum Technology | Academic Press, Inc. | A. Berman | May. 1985 |
| A User's Guide To Vacuum Technology | John Wiley & Sons | John F. O'Hanlon | Apr. 2003 |
| Handbook of Vacuum Science and Technology | Elsevier | Dorothy M. Hoffman | 1997 |
| Vacuum Physics and Technology | Elsevier | Editorial department | Nov. 2013 |
| Industrial Vacuum 101 (Second Edition: The Basics of Vacuum Technology) | CreateSpace Independent Publishing Platform | Dan Bott | Sep. 2013 |
| Vacuum Engineering Calculations, Formulas, and Solved Exercises | Elsevier | Armand Berman | Dec. 1992 |
| Vacuum Technology, 3rd Edition | North Holland | A Roth | Dec. 2012 |
| Method of Experimental physics (vol. 14) | Academic Press, Inc. | G. L. Weissler | 1979 |